Low-noise Si3N4 Membrane (40nm or thinner) on 5mm x 5mm Si/SiO2 chips (10 pieces) . 5 micron thick SiO2.
Item Code: GPRT900500
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Description
10 by 10 micron to 100 by 100 micron SiN membranes suspended on Si wafers (variable thicknesses, and chip sizes 3 x 3 mm, 5 x 5 mm or as specified)